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dass Begriffe wie
It is hoped that the book will also contribute to a better description
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The Physics of Submicron Lithography formatIsbn:Hardcover - 9780306435782 dass Begriffe wieThis book is devoted to the physics of electron beam, ion beam, optical, and x ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the
